This paper will examine the key packaging challenges in the fabrication of a 1000x1000 OXC, using MOEMS (micro-optical-electromechanical-systems) m...

This paper discusses the usage of common sensor types and how sensors can be effectively combined in a complementary fashion. It introduces the sta...

This paper discusses the challenges and success factors for creating the world's first integrated MEMS gyroscopes for the consumer electronics mark...